A folded leg Ka-band RF MEMS shunt switch with amorphous silicon (a-Si) sacrificial layer

Demirel, Kaan; Yazgan, Erdem; DEMİR, ŞİMŞEK; AKIN, TAYFUN

doi:10.1007/s00542-016-2892-5

A folded leg Ka-band RF MEMS shunt switch with amorphous silicon (a-Si) sacrificial layer

Demirel K., Yazgan E., DEMİR Ş., AKIN T.

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, cilt.23, sa.5, ss.1191-1200, 2017 (SCI-Expanded)

Yayın Türü: Makale / Tam Makale
Cilt numarası: 23 Sayı: 5
Basım Tarihi: 2017
Doi Numarası: 10.1007/s00542-016-2892-5
Dergi Adı: MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus
Sayfa Sayıları: ss.1191-1200
TED Üniversitesi Adresli: Evet

Özet

Design and fabrication of a folded leg Ka-band RF micro electro mechanical systems (RF MEMS) is presented. The mechanical design is carried out to observe minimum permanent deformation on the MEMS bridge after our in-house MEMS packaging process temperature treatment (200 A degrees C). On the other hand, the actuation voltage is aimed as < 30 V and measured as 24-25 V before thermal treatment. Moreover, the switch shows 28-29 V actuation voltage after thermal treatment. The fabricated switch shows -0.4 dB insertion loss for the up state position at Ka-band, before and after heat treatment. The switch is fabricated on quartz wafer using an in-house surface micromachining process with a new amorphous silicon sacrificial layer structure.