Laser nanolithography and pyrolysis of SZ2080 hybrid for slowing light in 3D photonic crystals

Gailevicius D., Jonusauskas L., Sakalauskas D., Hayran Z., KURT H., Turduev M., ...More

Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X 2017, California, United States Of America, 29 January - 01 February 2017, vol.10115 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Volume: 10115
  • Doi Number: 10.1117/12.2250537
  • City: California
  • Country: United States Of America
  • Keywords: ultrafast laser, 3D lithography, polymers, hybrid organic-inorganic, photonic crystal, pyrolysis, thermal post-treatment, slow light, 2-PHOTON POLYMERIZATION, LITHOGRAPHY, NANOSCALE, SHRINKAGE
  • TED University Affiliated: Yes

Abstract

© 2017 SPIE.In this work we explore a possibility to apply ultrafast 3D laser nanolithography in conjunction with pyrolysis to acquire glass-ceramic 3D structures in micro- and nano-scale. Laser fabrication allows for production of initial 3D structures with relatively small (hundreds nm - μm) feature sizes out of SZ2080 hybrid material. Then, postfabrication heating at 600°C in Ar atmosphere decomposes organic part of the material leaving the glass-ceramic component of the hybrid. Resulting structures are uniformly shrunk by 40%. This brings us one step closer to fabricating highly efficient slow-light absorbers.