Laser nanolithography and pyrolysis of SZ2080 hybrid for slowing light in 3D photonic crystals
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X 2017, California, United States Of America, 29 January - 01 February 2017, vol.10115, (Full Text)
- Publication Type: Conference Paper / Full Text
- Volume: 10115
- Doi Number: 10.1117/12.2250537
- City: California
- Country: United States Of America
- Keywords: ultrafast laser, 3D lithography, polymers, hybrid organic-inorganic, photonic crystal, pyrolysis, thermal post-treatment, slow light, 2-PHOTON POLYMERIZATION, LITHOGRAPHY, NANOSCALE, SHRINKAGE
- TED University Affiliated: Yes
Abstract
© 2017 SPIE.In this work we explore a possibility to apply ultrafast 3D laser nanolithography in conjunction with pyrolysis to acquire glass-ceramic 3D structures in micro- and nano-scale. Laser fabrication allows for production of initial 3D structures with relatively small (hundreds nm - μm) feature sizes out of SZ2080 hybrid material. Then, postfabrication heating at 600°C in Ar atmosphere decomposes organic part of the material leaving the glass-ceramic component of the hybrid. Resulting structures are uniformly shrunk by 40%. This brings us one step closer to fabricating highly efficient slow-light absorbers.